The big platform and the cross roller bearing guarantee a smooth and highly accurate movement in the sub-nanometer range.
LPS-65 stages can be controlled with PI's E-861 piezo controller and an optional linear encoder provides nanometer repeatability. Vacuum compatible versions are also available.
Key features:
-Piezo driven stepping motor with sub-nanometer resolution
-Travel range up to 52mm
-Uni-directional repeatability down to 0.005µm
-Maximum speed 10mm/sec
-Load capacity up to 2kg
-Encoder resolution 0.5nm
-Integrated linear scale