Today, the Veriflo division of Parker Hannifin introduces a miniature point-of-use pressure regulator designed to reduce semiconductor tool real estate and costs. Despite a compact footprint of just 1.25 inches square (31.75 mm), the new MiniQR offers excellent performance including a Cv of 0.1 and an ability to accommodate inlet pressures to 500 PSIG (35 BarG).
MiniQR is a threadless style, non-tied, double-diaphragm regulator for pressure control of high purity gases. Designed using the same dimensions as Veriflo's well-known Quantum valves and SQMicro regulators, it allows semiconductor tool OEMs to mount gas stick components more closely, to reduce system footprints.
The regulator offers exceptional performance for a miniature design. This includes a Cv (flow coefficient) of 0.1 typical, and a maximum inlet pressure of 500 PSIG (35 BarG) with a choice of outlet pressure ranges of 1-30, 1-60, 2-100 or 3-250 PSIG (from 2 to 17 BarG).
This relatively high Cv and broad operating range means that the MiniQR is purged rapidly, and may be used in a wide variety of regulator applications - allowing tool OEMs to standardize on one component across a range of systems. Fabricated from 316L stainless steel, with Hastelloy C-22 diaphragms and an Inconel poppet, the MiniQR is available with either tube stub or face seal connections.
For extended reliability and life, the valve features a PCTFE seat with a poppet design that is self-centering, for repeatable positive closure. The standard surface finish (Ra value) is 10 micro-inch or less, with a 5 micro-inch finish available as an option. The MiniQR operates over a -40 to +150 degrees F (-40 to +66 degrees C) temperature range.