At Sensor+Test in Nürnberg, the Swiss company Sensirion AG has presented a breakthrough in digital MEMS gas flow and differential pressure sensors.
Sensirion CMOSens gas flow and differential pressure sensors have been produced with integrated intelligence in large quantities for several years. Produced on silicon base by a standard CMOS process, the sensors are being successfully used worldwide in several products and markets.
After more than 15 years of research and development, the production has been enhanced to 8“ wafer handling. Thus, CMOSens high-performance gas flow and differential pressure sensors can now be produced even in millions at highest quality while further reducing costs. This is possible thanks to the patented CMOSens Technology. Hence, in its latest generation, Sensirion sensors can host complete intelligent sensor systems on very small (semiconductor) space. Such sensors feature built-in self-test algorithms, which make them a perfect suit for demanding applications, eg. medical or gas burner control applications.
The first gas flow and differential pressure sensors exploiting all advantages of the latest generation CMOSens Technology will be available in series from fourth quarter 2007.